SULFAMIC ACID Cleaner

SULFAMIC ACID

Used for Electronic Material Cleaning

A cleaning agent for electronic materials, more specifically, relates to an electronic material cleaning agent that does not pollute electronic materials and does not need to worry about corrosion to manufacturing equipment, and has excellent removal ability for small particles on electronic materials. The cleaning agent used in this electronic material has excellent cleaning ability for small particles and organic matter, can reduce metal pollution on the substrate, and can improve the production rate during manufacturing. It can clean in a short time, making this highly effective cleaning possible. The present invention is a cleaning agent for electronic materials, which includes amino sulfonic acid (A), anionic surfactant (B) with at least one sulfonic group or salt of the sulfonic group within the molecule, chelating agent (C), and water; Preferably, the pH is below 3 at 25 ℃; In addition, a high molecular weight anionic surfactant with a weight average molecular weight of 1000 to 2000000 is preferred for (B)

Advantage

The cleaning agent for the electronic material contains amino sulfonic acid. The cleaning agent for the electronic material of the present invention can prevent particle particles from adhering to the electronic material as part of the existing cleaning process, and can effectively remove fine particles. It also has the effect of improving the reliability and yield of the component. In addition, the cleaning agent for the electronic material of the present invention will not react with trace metal ions present in water during cleaning to generate water insoluble substances, There is no need to worry about secondary pollution caused by cleaning agents, nor will it cause corrosion to metal components used in manufacturing equipment.